Characterization of Diamond-Like Film after Focused Ion Beam Processing
نویسندگان
چکیده
Optical properties (transmission and refractive index) and chemical structure (XPS) of diamond-like coating (DLC) film before and after focused ion beam milling (FIBM) process, were investigated in this paper. It is shown by our FIBM experiment that influence of FIBM on Optical properties and chemical structure of the DLC film is not apparent, especially in near-infra region. The film still can be used for optical applications. As an application example, diffractive optical element (DOE) was directly fabricated on the film by use of FIBM. Measured diffraction efficiency of the DOE is 73%, which is acceptable for conventional use. Index terms DLC, FIBM, optical properties, XPS
منابع مشابه
Effect of bias voltage on structural and mechanical characteristics of diamond-like carbon thin film applied by ion beam deposition
This study, investigates the effect of bias voltage on structural changes of diamond-like carbon thin film created by ion beam deposition is investigated. For this purpose, the bias voltage in the values of 0 V, -50 V, -100 V and -150 V on the AA5083 aluminum alloy was considered. Raman spectroscopy was used to evaluate structural. Influence of the bias voltage on the thickness and roughness of...
متن کاملPatterning Amorphous Fluoropolymer Films by Reactive Ion Milling
Amorphous fluoropolymer films have low dielectric constants and high chemical resistance and, so, have potential to be used as the insulator for high speed interconnects and as protection layers. Many applications would require high resolution patterning of the fluoropolymer film. We have found that these films are easily etched by reactive ion beam etching using an O2/Ar gas mixture. High etch...
متن کاملDeposition and characterization of ultra thin diamond like carbon films
Amorphous hydrogenated and/or nitrogenated carbon films, a-C:H/a-C:N, in overall thickness up to 2 nm are materials of choice as a mechanical and corrosion protection layer of the magnetic media in modern hard disk drive disks. In order to obtain high density and void-free films the sputtering technology has been replaced by different plasma and ion beam deposition techniques. Hydrocarbon gas p...
متن کاملA Membrane Deflection Fracture Experiment to Investigate Fracture Toughness of Freestanding MEMS Materials
This paper presents a novel Membrane Deflection Fracture Experiment (MDFE) to investigate the fracture toughness of MEMS and other advanced materials in thin film form. It involves the stretching of freestanding thin-film membranes, in a fixed-fixed configuration, containing pre-existing cracks. The fracture behavior of ultrananocrystalline diamond (UNCD), a material developed at Argonne Nation...
متن کاملThe field emission properties of high aspect ratio diamond nanocone arrays fabricated by focused ion beam milling
High aspect ratio diamond nanocone arrays are formed on freestanding diamond film by means of focused ion beam (FIB) milling technology and hot-filament chemical vapor deposition (HFCVD) method. The structure and phase purity of an individual diamond nanocone are characterized by scanning electron microscopy (SEM) and micro-Raman spectroscopy. The result indicates that the diamond cones with hi...
متن کامل